Gas ion source with high mechanical stability

Details Gas ion source with high mechanical stability Gas ion source with high mechanical stability

2008-08-27

2011-10-25

Maskell, Michael (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S42300F, C250S306000, C250S307000, C250S309000, C250S492300

Reexamination Certificate

active

08044370

ABSTRACT:
A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.

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Extended European Search Report; May 8, 2008; Application No. 07016766.3-2208.

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