Gas discharge structure

Coherent light generators – Particular pumping means – Electrical

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372 95, 372 55, H01S 3097

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active

055286194

ABSTRACT:
In order to produce a gas discharge structure for two-dimensionally extending gas discharges comprising a pair of electrodes including a first and a second electrode which have mutually facing electrode surfaces, a gas discharge space arranged between the electrode surfaces with a plasma gas provided therein and a high frequency source with which a current can be fed into the pair of electrodes for producing a plasma between the first and the second electrode, in such a way that wavelength dependent modulations of the field strength substantially no longer occur in the gas discharge space, it be proposed that, the electrode surface of the first electrode is divided into two partial electrode surfaces that are located adjacent to one another in this electrode surface but are electrically separated from one another, that the partial electrode surfaces have mutually facing edge regions which extend at a defined distance from one another, that the partial electrode surfaces be connected to two terminals of the high frequency source which are at different potentials in such a way that a surface current flows over one of the edge regions to and then over the other one and that the second electrode be at an intermediate potential which lies between that of the two partial electrodes.

REFERENCES:
patent: H882 (1991-01-01), Fox
patent: 4547883 (1985-10-01), Cohn et al.
patent: 4885754 (1989-12-01), Egawa
V. Rousseau, et al., Efficient Pulsed Microwave Excitation of a High-Pressure Excimer Discharge, J. Appl. Phys., vol. 71, No. 11, 1 Jun. 1992, pp. 5712-5714.

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