4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Deutsche Forschungsanstalt fuer Luft-und Raumfahrt e.V.

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Apparatus for removing material from a target

Coherent light generators – Particular resonant cavity – Specified output coupling device
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Gas discharge structure

Coherent light generators – Particular pumping means – Electrical
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Laser system

Optical waveguides – With optical coupler – Input/output coupler
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Method for operating a hydrogen engine, motor-vehicle drive

Internal-combustion engines – Combined devices – Generating plants
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Micromechanical tool

Electric heating – Metal heating – By arc
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