Gas detecting device

Details Gas detecting device Gas detecting device

1988-12-22

1990-11-06

Williams, Hezron E.

Measuring and testing

Gas analysis

With compensation detail

73 3106, 295921, G01N 2712

Patent

active

049675893

ABSTRACT:
A gas detecting device includes a substrate, an insulator layer formed on the substrate, a gas sensitive layer formed the insulator layer, a pair of detection leads formed on the insulator layer, the gas sensitive layer partially overlying the pair of detection leads, a signal derived from the gas sensitive layer being sent to an external circuit through the pair of detection leads, a heater member arranged on the insulator layer in the vicinity of the gas sensitive layer, and an insulation coating layer formed on the pair of detection leads and the heater member, and partially overlying the gas sensitive layer so that the gas sensitive layer is put between the insulator layer and the insulation coating layer, and a portion of an upper surface of the gas sensitive layer is exposed to gas.

REFERENCES:
patent: 4358950 (1982-11-01), Chang
patent: 4580439 (1986-04-01), Manaka
patent: 4677416 (1987-06-01), Nishimoto et al.
T. Oyabu, "Sensing characteristics of SnO.sub.2 thin film gas sensor", J. Appl. Phys., 53, 1982, pp. 2785-2787 (p. 65).
H. Ogawa et al., "Electrical Properties of Tin Oxide Ultrafine Particle Films", The Electrochemical Society, vol. 128, No. 9, pp. 2020-2025, 1981.

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