Gas delivery system for supplying gas to semiconductor...

Details Gas delivery system for supplying gas to semiconductor... Gas delivery system for supplying gas to semiconductor...

2006-05-09

2006-05-09

Rivell, John (Department: 3753)

Fluid handling

Processes

C137S312000, C137S552000, C700S082000, C700S282000

Reexamination Certificate

active

07040336

ABSTRACT:
A gas delivery system for providing a gas to manufacturing equipment includes a gas supply unit for providing the gas to the manufacturing equipment including devices to regulate the supply of gas from the gas supply unit to the manufacturing equipment. The system includes a main control unit for regulating the supply of the gas to the manufacturing equipment. The gas delivery system includes a supplemental control unit which receives an emergency shutdown signal from the main control unit for closing off the supply of gas in response to a malfunction of the main control unit and generates a signal for maintaining a gas flow to operate the manufacturing equipment until the cause of the malfunction has been determined. With the system, an unnecessary emergency shutdown of gas supply to semiconductor manufacturing equipment in response to a malfunction of a main controller can be prevented.

REFERENCES:
patent: 3377623 (1968-04-01), Reut et al.
patent: 4635209 (1987-01-01), Hwang et al.
patent: 5748470 (1998-05-01), Hager et al.
patent: 6216051 (2001-04-01), Hager et al.
patent: 6314986 (2001-11-01), Zheng et al.
patent: 6516249 (2003-02-01), Hoyle et al.

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