Gas delivery system for an ion source

Details Gas delivery system for an ion source Gas delivery system for an ion source

2011-08-23

2011-08-23

Johnston, Phillip A (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S425000, C250S492210

Reexamination Certificate

active

08003954

ABSTRACT:
An ion source has an arc chamber with an electron-emitting element and a repeller. A manifold assembly defines a cavity and a gas outlet configured to allow gas flow to the arc chamber. This gas outlet is closer to the repeller than the electron-emitting element. In one embodiment, the ion source has a first crucible and a second crucible. The first crucible and the second crucible are connected to the manifold assembly. In one instance, the crucibles have tamper-resistant features.

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