Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1996-11-18
1999-06-15
Bueker, Richard
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
134 12, 4272481, 156345, 118715, 118719, C23C 1600
Patent
active
059118342
ABSTRACT:
The present invention provides a method and apparatus for delivering one or more process gases and one or more cleaning gases into one or more processing regions. The gas distribution system includes a gas inlet and a gas conduit, each disposed to deliver one or more gases into the chamber via a desired diffusing passage. Also, a gas delivery method and apparatus for splitting a gas feed into multiple feed lines is provided having a gas filter disposed upstream from a splitting coupling disposed in the line.
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Cheung David
Fairbairn Kevin
Ponnekanti Hari K.
Applied Materials Inc.
Bueker Richard
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