Gapped-plate capacitor

Details Gapped-plate capacitor Gapped-plate capacitor

1998-09-03

2000-01-25

Saadat, Mahshid

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257312, 257532, 257535, 257599, 257600, H01L 27108, H01L 2976, H01L 2900, H01L 2993, H01L 31119

Patent

active

060181753

ABSTRACT:
In a semiconductor device, a capacitor is provided which has a gap in at least one of its plates. The gap is small enough so that fringe capacitance between the sides of this gap and the opposing plate at least compensates, if not overcompensates, for the missing conductive material that would otherwise fill the gap and add to parallel capacitance. As a result, the capacitance of a storage device can be increased without taking up more die area. Alternatively, the size of a capacitor can be reduced with no decrease in capacitance. Various gap configurations and methods for providing them are also within the scope of the current invention.

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