Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1982-10-19
1985-07-09
Smith, Alfred E.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
2504421, 2504422, 219121EN, 219121EQ, 219121EX, 219121EY, H01J 3718, H01J 3720, H01J 3302
Patent
active
045284512
ABSTRACT:
Apparatus for controlling the gap between localized vacuum processing envelope apparatus and a workpiece as the workpiece, typically a semiconductor wafer, is moved laterally with respect to the envelope apparatus. The envelope apparatus includes an envelope which defines an internal vacuum processing zone and a generally planar tip spaced from the workpiece during processing by the gap. The gap control apparatus includes a gap sensor for measuring the gap, a control circuit for comparing the measured gap with a required gap and generating an error signal, and an actuating means for varying the gap in response to the error signal. The gap can be sensed by sensing the pressure level in the vacuum processing apparatus. The actuating means can include a plurality of piezoelectric actuators which can vary both the gap and the angle of the workpiece with respect to the tip of the vacuum processing apparatus. The disclosed apparatus is particularly useful in connection with particle beam systems such as electron beam lithography systems. In another embodiment, the gap is controlled by an air bearing between the envelope apparatus and the workpiece.
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Foley Michael S.
Laiacano Joseph A.
Petric Paul F.
Utlaut Mark W.
Berman Jack I.
Cole Stanley Z.
McClellan William R.
Smith Alfred E.
Varian Associates Inc.
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