Gantry-type XY stage

Details Gantry-type XY stage Gantry-type XY stage

2007-07-03

2007-07-03

Nguyen, Kiet T. (Department: 2881)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S757020, C324S1540PB, C356S244000

Reexamination Certificate

active

10974753

ABSTRACT:
Nine vibration isolating mounts are disposed on a pedestal, and a granite plate is placed thereon. A pair of guide bases are disposed on the granite plate, and disposed thereon are a pair of posts made of CFRP for movements in a Y-direction relative to the granite plate. A beam made of CFRP is extended between the pair of posts. Further, a movement base is disposed for movement in an X-direction relative to the beam, and a laser optical unit is mounted on the movement base.

REFERENCES:
patent: 5543726 (1996-08-01), Boyette et al.
patent: 61-76239 (1986-04-01), None
patent: 11-116696 (1999-04-01), None
patent: 11-235622 (1999-08-01), None
patent: 11-277351 (1999-10-01), None
patent: 2000-263356 (2000-09-01), None
patent: 2002-158274 (2002-05-01), None
patent: 2002-192426 (2002-07-01), None
patent: 2002-521214 (2002-07-01), None
patent: WO 00/05028 (2000-02-01), None
Document describing a gantry-type XY-stage sold by Sumitomo Heavy Industries, Ltd.
High Precision XY Stage for Large Size FPD Substrate, SIGMA Co., Ltd.

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