Gallium nitride-based III-V group compound semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction

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257 22, 257 76, 257 79, 257103, 257615, 257741, 257745, 257750, 257751, 257763, 257764, 257765, 257766, 257770, 257771, H01L 2906

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055634222

ABSTRACT:
A gallium nitride-based III-V Group compound semiconductor device has a gallium nitride-based III-V Group compound semiconductor layer provided over a substrate, and an ohmic electrode provided in contact with the semiconductor layer. The ohmic electrode is formed of a metallic material, and has been annealed.

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