Gallium arsenide crystal growth

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

1566162, 1566163, 1566164, 156624, C30B 1100

Patent

active

048406996

ABSTRACT:
A process that, without doping of PBN crucibles, produces semi-insulating GaAs having low, or essentially no, dislocation density; and in which the crystal may be in situ annealed after growth. The process is a variant of the Heat Exchanger Method (HEM) disclosed in U.S. Pat. No. 3,898,051. Crack-free, semi-insulating GaAs crystals having low dislocation density are grown from presynthesized undoped GaAs meltstock in sealed quartz (vitreous silica) crucibles, without the need for an encapsulant. One aspect of the invention features seeded growth of <100> orientation crystals having a dislocation density 1-2 orders of magnitude less than that of the seed; in another aspect, crystals having fewer than 500 dislocations/cam.sup.2 in their center column are grown without a seed.

REFERENCES:
patent: 3898051 (1975-08-01), Schmid
patent: 4404172 (1983-09-01), Gault
patent: 4610754 (1986-09-01), Gaida et al.
patent: 4687538 (1987-08-01), Pastor
Crystal Growth, Second Edition, Pamplin ed., 1980 vol. 16, pp. 171-174.
Practical Comparison of LEC Production Methods for Si-GaAs, Lane, Semiconductor International, Oct. 1984.
Willardson, R. K., "Crystal Growth of Semi-Insulating Gallium Arsenside," 1984 Semi-Insulating III-V Materials, Kah-nee-ta (Nantwich--Shiva)(1984).
Ghez, R., et al, "Why Not Grow GaAs By Vertical Bridgman?", AACG Newsletter vol. 13, 3, p. 5 (Nov. 1983).
Jordan, A. S., et al, "The Theory and Practice of Dislocation Reduction in GaAs and InP", Journal of Crystal Growth 70 pp. 555-573 (1984).
Press Release of Ghemini Technologies, Jan. 6, 1984.
DiLorenzo, J. V., et al, "Substrate Quality: How Important for Future GaAs ICs?" 1984 Semi-Insulating III-V Materials, Kah-nee-ta (Nantwich: Shiva) (1984).
Kirkpatrick, C. G., et al, "LEC GaAs for Integrated Circuit Applications" from Semiconductors and Semi-Metals (R. K. Willardson and A. C. Beer, eds), vol. 20, Semi-Insulating GaAs (Academic Press (1984) (pp. 159-231).
Thomas, R. V, et al "High-Purity LEC Growth and Direct Implantation of GaAs for Monolithic Circuits," (Academic Press (1984)) pp. 1-87.
Swiggard E. et al, "LEC Growth of Undoped Semi-Insulating GaAs", at the Naval Research Laboratories,: AACG Newsletter vol. 18, 1 (American Association for Crystal Growth) Mar. 1988, p. 3.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Gallium arsenide crystal growth does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gallium arsenide crystal growth, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gallium arsenide crystal growth will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-523960

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.