G2-Gyroscope: MEMS gyroscope with output oscillation about...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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C073S504120

Reexamination Certificate

active

07406867

ABSTRACT:
A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar support member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar gyro member coplanar with and flexibly coupled to the support member such that it is capable of rotary oscillatory motion relative to the support member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the gyro member about the drive axis, and one or more gyro output sensors that detect oscillation of the gyro member about the output axis.

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Pitman, G.R., Jr., Inertial Guidance, University of California Engineering and Physical Sciences Extension Series, J. Wiley and Sons, Inc., New York, 1962, J.S. Ausman, ch.3.

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