Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2006-04-25
2006-04-25
Nghiem, Michael (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S182000
Reexamination Certificate
active
07035770
ABSTRACT:
System and method for detecting suspicious process faults. A preferred embodiment comprises determining a strength relationship between wafer acceptance test (WAT) parameters and process steps. The strength relationships indicate the affect of a failed process step on the value of a WAT parameter. Thus, if a WAT parameter is not within the parameters set in the WAT, then the suspicious process steps that caused the failure are the process steps that had a strength relationship with the failed WAT parameter. Furthermore, in a preferred embodiment, negative inferences are determined and utilized to determine a degree of suspiciousness. The degree of suspiciousness is used to determine a total degree of suspiciousness.
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Chen Yi-Ju
Hsiao Kuo-Rung
Lin Shuo-Huei
Peng Ruenn-Sheng
Nghiem Michael
Slater & Matsil L.L.P.
Taiwan Semiconductor Manufacturing Company , Ltd.
Washburn Douglas N
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