Fusible links with improved interconnect structure

Details Fusible links with improved interconnect structure Fusible links with improved interconnect structure

1995-11-28

1998-06-02

Picard, Leo P.

Electricity: electrothermally or thermally actuated switches

Electrothermally actuated switches

Fusible element actuated

337152, 337295, 337293, 257529, H01H 8500

Patent

active

057606749

ABSTRACT:
The fuse link includes a first and second interconnect, with interconnects each being substantially longer than deep. The interconnects are disposed toward each other with a insulator region between them. A fusible conductor, spanning the insulator region, is attached at the top of the interconnects. The present device allows the length of the fusible conductor to be shortened, and results in a fuse link that can be consistently blown with a single laser pulse. Additionally, the fuse link can be used in a staggered layout. The staggered layout of parallel fuse links allows a high number of links in a relatively small area, with or without the use of tungsten barriers, and allows accessing all fuse links through a single fuse blow window.

REFERENCES:
patent: 4198744 (1980-04-01), Nicolay
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patent: 4740485 (1988-04-01), Sharpe-Geisler
patent: 4935801 (1990-06-01), McClure et al.
patent: 5221426 (1993-06-01), Tessier et al.
patent: 5285099 (1994-02-01), Carruthers et al.
patent: 5321300 (1994-06-01), Usuda et al.
patent: 5543774 (1996-08-01), Lof
Minimum Groundrule, Electrically Blown Tungsten/Aluminum Fuse by Electromigration, IBM Technical Disclosure Bulletin, Oct. 1998, vol. 31, No. 5, pp. 347-348.

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