Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Patent
1993-07-28
1994-03-29
Breneman, R. Bruce
Cleaning and liquid contact with solids
Processes
For metallic, siliceous, or calcareous basework, including...
134 221, 134 2211, B08B 900
Patent
active
052980758
ABSTRACT:
A process for thermal oxidation of silicon or cleaning of furnace tubes used in semiconductor manufacturing by exposing the silicon or tube to temperatures above 700.degree. C. while flowing a carrier gas containing oxygen and a chlorohydrocarbon having a general formula C.sub.x H.sub.x Cl.sub.x where x is 2, 3, or 4 over the silicon or tube. The chlorohydrocarbon is selected to readily and completely oxidize at temperature.
REFERENCES:
patent: 3837905 (1974-09-01), Hile et al.
patent: 4563367 (1986-01-01), Sherman
Hochberg Arthur K.
Lagendijk Andre
Roberts David A.
Air Products and Chemicals Inc.
Breneman R. Bruce
El-Arini Zeinab
Marsh William F.
Simmons James C.
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