Full CMOS type SRAM and method of manufacturing same

Details Full CMOS type SRAM and method of manufacturing same Full CMOS type SRAM and method of manufacturing same

1993-06-17

1994-11-08

Clawson, Jr., Joseph E.

Static information storage and retrieval

Systems using particular element

Flip-flop

365182, 257 66, 257 67, 257 69, G11C 1140

Patent

active

053633245

ABSTRACT:
A method for manufacture of a full CMOS type SRAM, comprising the steps of forming a first mask layer on a semiconductor layer, and patterning the first mask layer by photolithography to form semiconductor island layers where a driver MOS transistor and a load MOS transistor are formable with a slight space therebetween; forming a second mask layer on the semiconductor layer, and patterning the second mask layer by photolithography in such a manner as to overlap the region with one of the driver and load MOS transistors, but not to overlap the isolating region between the transistors; masking, with a resist film, the region with the other of the driver and load MOS transistors, and etching the first mask layer while masking the same with the resist film and the second mask layer; and etching the semiconductor layer while masking the same with the first mask layer, thereby forming mutually isolated semiconductor island layers where the driver and load MOS transistors are formed respectively. According to this method, the width of each transistor and the space between the transistors can be minimized to consequently achieve an enhanced integration density.

REFERENCES:
patent: 5134581 (1992-07-01), Ishibashi et al.
patent: 5222039 (1993-06-01), Vinal

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