Front-wing cantilever for the conductive probe of electrical...

Details Front-wing cantilever for the conductive probe of electrical... Front-wing cantilever for the conductive probe of electrical...

2007-05-01

2007-05-01

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

11137575

ABSTRACT:
The present invention discloses a front-wing cantilever for the conductive probe of electrical scanning probe microscopes, wherein two symmetrical front wings are installed to extend from two lateral sides of the front end of the cantilever so that those two front wings are positioned on two lateral sides of the conductive tip. The front-wing structure of the cantilever can effectively inhibit the optical perturbation in the electrical scanning probe microscopes and obviously promote the analysis accuracy thereof. The front-wing structure can provide the scanned region with an effective dark field lest the optical absorption appears in the scanned region of semiconductor specimen and inhibit the optical perturbation occurs during the measurement and analysis of the differential capacitance.

REFERENCES:
patent: 5959200 (1999-09-01), Chui et al.
patent: 2003/0022470 (2003-01-01), Liu et al.
patent: 1359593 (2003-11-01), None

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