Front opening substrate container with bottom plate

Details Front opening substrate container with bottom plate Front opening substrate container with bottom plate

2007-04-10

2007-04-10

Yu, Mickey (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S711000, C206S832000

Reexamination Certificate

active

10982400

ABSTRACT:
A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.

REFERENCES:
patent: 4552288 (1985-11-01), Flider
patent: 4696395 (1987-09-01), Rivoli
patent: 6273261 (2001-08-01), Hosoi
patent: 6398032 (2002-06-01), Fosnight et al.
patent: 6513658 (2003-02-01), Adkins
patent: 6520338 (2003-02-01), Bores et al.
patent: 6811029 (2004-11-01), Eggum
patent: 2002/0149319 (2002-10-01), Kim et al.
patent: 2003/0047562 (2003-03-01), Wu et al.
patent: 2003/0106830 (2003-06-01), Eggum
patent: 2005/0077204 (2005-04-01), Sumi et al.

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