Front opening substrate container with bottom plate

Details Front opening substrate container with bottom plate Front opening substrate container with bottom plate

2011-01-11

2011-01-11

Pickett, J. Gregory (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C220S745000

Reexamination Certificate

active

07866480

ABSTRACT:
A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.

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