Fresh air ducts including downstream filters for clean rooms

Details Fresh air ducts including downstream filters for clean rooms Fresh air ducts including downstream filters for clean rooms

2005-02-01

2005-02-01

Spitzer, Robert H. (Department: 1724)

Gas separation

Combined or convertible

In environmental air enclosure

C055S471000, C055S473000, C055S480000, C055S482000, C055S505000

Reexamination Certificate

active

06849100

ABSTRACT:
A fresh air duct is configured to direct fresh air filtered by an air conditioning system towards a clean room downstream from the fresh air duct, the fresh air having a first level of particle density. A separate particle filter in the fresh air duct, located downstream from the air conditioning system and upstream from the clean room, is configured to further filter the fresh air to provide filtered fresh air having a second level of particle density therein that is less than the first level. Related methods are also disclosed.

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Notice to File Response for corresponding Korean Application No. 2002-0017479 dated Jul. 22, 2004 (English Translation).

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