Frequency tunable resonant scanner

Details Frequency tunable resonant scanner Frequency tunable resonant scanner

2007-06-05

2008-10-14

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S225100, C359S295000

Reexamination Certificate

active

07436574

ABSTRACT:
Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.

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