Frequency trimming of surface acoustic wave devices

Details Frequency trimming of surface acoustic wave devices Frequency trimming of surface acoustic wave devices

1980-01-21

1981-07-14

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 156646, 156656, 156657, 204192E, 324 56, B44C 122, C03C 1500, C03C 2506, C23F 100

Patent

active

042784921

ABSTRACT:
A process is provided for trimming a SAW device while the device is energized and operating at its center frequency. By essentially selectively sputter-etching the substrate or the transducer material only, without requiring a masking operation, the center frequency and other electrical characteristics of the SAW device are trimmed in a precise and controlled manner.

REFERENCES:
patent: 4092588 (1978-05-01), Desormiere et al.
patent: 4176004 (1979-11-01), Johnson et al.

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