Forming a semiconductor device feature using acquired...

Details Forming a semiconductor device feature using acquired... Forming a semiconductor device feature using acquired...

2006-07-25

2006-07-25

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

Reexamination Certificate

active

07081369

ABSTRACT:
In one embodiment of the present invention, a method includes acquiring parameters for a desired feature of a semiconductor device; determining a data array using the parameters; and forming the desired feature using the data array. The desired feature in one embodiment may be a backside trench.

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Disclosure Of Information Pursuant To M.P.E.P. §§ Apr. 2001 and Jun. 2001.

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