Forming a plurality of thin-film devices using imprint...

Details Forming a plurality of thin-film devices using imprint... Forming a plurality of thin-film devices using imprint...

2006-06-06

2006-06-06

Geyer, Scott B. (Department: 2812)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Reexamination Certificate

active

07056834

ABSTRACT:
An aspect of the present invention is a method for forming a plurality of thin-film devices. The method includes providing a flexible substrate and utilizing a self-aligned imprint lithography (SAIL) process to form the plurality of thin-film devices on the flexible substrate.

REFERENCES:
patent: 2002/0132482 (2002-09-01), Chou

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