Forming a pattern on a substrate

Details Forming a pattern on a substrate Forming a pattern on a substrate

1989-08-28

1992-06-16

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430313, 430314, 430319, 430323, G03C 500

Patent

active

051224399

ABSTRACT:
A pattern is formed on a substrate by providing on the substrate a dielectric composition; defining a pattern in said dielectric; depositing metal and then micromachining the metal to provide the desired pattern on the substrate.

REFERENCES:
patent: 3659510 (1972-05-01), Garvin et al.
patent: 3791858 (1974-02-01), McPherson et al.
patent: 4272612 (1981-06-01), Oliver
patent: 4289381 (1981-09-01), Garvin et al.
patent: 4576900 (1986-03-01), Chiang
patent: 4585519 (1986-04-01), Jaffe et al.
patent: 4629681 (1986-12-01), Takada et al.
patent: 4861420 (1989-08-01), Knutti et al.
patent: 4918032 (1990-04-01), Jain et al.

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