Forming a high performance Co/Pt disk

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

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2041922, C23C 1434

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active

056932006

ABSTRACT:
A method of forming a magneto-optical medium is disclosed. The method includes providing a seed layer on a substrate and forming a recording multilayer which includes sputtering at a pressure of greater than 15 mT alternating layers of Co/Pt to deposit them on said seed layer, wherein the seed layer is deposited at sputtering pressure of less than 5 mT and the seed layer material is selected to improve the coercivity and squareness of the Kerr hysteresis loop of the recording multilayer.

REFERENCES:
patent: 5068022 (1991-11-01), Carcia
patent: 5082749 (1992-01-01), Carcia
"Co/Pt and Co/Pd Ultrathin Multilayered Films as New Magneto-Optical Recording Materials", by Y. Ochiai, et al, IEEE Transactions on Magnetics, vol. 25, No. 5, Sep. 1989, pp. 3755-3757.
"Dielectric Enhancement Layers for a Pt/Co Multilayer Magneto-Optical Recording Medium", by P. F. Carcia, et al, Appl. Phys. Lett. vol. 58(2), Jan. 14, 1991, pp. 191-193.
"Effect of Sputter-Deposition Processes on the Microstructure and Magnetic Properties of Pt/Co Multilayers", by P. F. Carcia, et al, Journal of Magnetism and Magnetic Materials vol. 121 (1993), pp. 452-460.
"Co/Pt and Co/Pd Multilayers as Magneto-Optical Recording Materials", by S. Hashimoto, et al, Journal of Magnetism and Magnetic Materials vol. 88 (1990), pp. 211-226.
"Hysteresis, Microstructure, and Magneto-Optical Recording in Co/Pt and Co/Pd Multilayers", by W. B. Zeper, et al, Journal Applied Physics vol. 70 (4), Aug. 15, 1991, pp. 2264-2271.

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