Formation of variable-width sidewall structures

Details Formation of variable-width sidewall structures Formation of variable-width sidewall structures

1987-10-30

1988-10-11

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156648, 156653, 156656, 156657, 1566591, 156668, 20419237, 437228, 437235, 437245, B44C 122, C03C 1500, C23F 102, B29C 3700

Patent

active

047769220

ABSTRACT:
Spacers are formed having widths that vary as a function of the spacing between the mandrels upon which the conformal material that defines the spacers is deposited and etched. As the spacing between adjacent mandrels decreases, the width of the resulting spacers decreases. The correlation between mandrel spacing and sidewall structure width is independent of the thickness of the conformal material as-deposited. As the spacing between the mandrels decreases, the decrease in width becomes more pronounced, particularly at mandrel spacings of five microns or less. Thus, by making adjacent mandrels closer together or further apart and adjusting mandrel height, active/passive components having differing widths/lengths may be formed from the same conformal layer.

REFERENCES:
patent: 4424621 (1984-01-01), Abbas et al.
patent: 4502914 (1985-03-01), Trumpp et al.
patent: 4577391 (1986-03-01), Hsia et al.
patent: 4648937 (1987-03-01), Ogura et al.

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