Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-09-07
2009-02-17
Lebentritt, Michael S. (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Reexamination Certificate
active
07491637
ABSTRACT:
The present invention is directed to a method forming conductive templates that includes providing a substrate; forming a mesa on the substrate; and forming a plurality of recessions and projections on the mesa with a nadir of the recessions comprising electrically conductive material and the projections comprising electrically insulative material. It is desired that the mesa be substantially transparent to a predetermined wavelength of radiation, for example ultraviolet radiation. As a result, it is desired to form the electrically conductive material from a material that allows ultraviolet radiation to propagate therethrough. In the present invention indium tin oxide is a suitable material from which to form the electrical conductive material.
REFERENCES:
patent: 6309957 (2001-10-01), Tu et al.
patent: 6878985 (2005-04-01), Arai et al.
Choi Byung-Jin
McMackin Ian M.
Sreenivasan Sidlgata V.
Voisin Ronald D.
Fish & Richardson P.C.
Kordzik Kelly K.
Lebentritt Michael S.
Molecular Imprints, Inc.
Stevenson Andre′
LandOfFree
Formation of conductive templates employing indium tin oxide does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Formation of conductive templates employing indium tin oxide, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Formation of conductive templates employing indium tin oxide will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4127312