Foreign particle inspection apparatus

Details Foreign particle inspection apparatus Foreign particle inspection apparatus

1995-02-21

1997-04-22

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

G01N 2188

Patent

active

056233400

ABSTRACT:
A foreign particle inspection apparatus, for detecting a foreign particle on a reticle or the like includes an illumination system for irradiating an inspection area on a specimen with inspecting light, and plural light-receiving systems adapted to condense the scattered light from a foreign particle in the inspection area and having respective light-receiving areas on the specimen, each smaller than the inspection area. Each of the light-receiving areas of the plural light-receiving systems overlaps partially with at least one of the other light-receiving areas. The plural light-receiving systems are so arranged that any point in the inspection area is covered by the light-receiving areas of at least two of the plural light-receiving systems. A foreign particle in the inspection area is detected by a detection system, based on the lights condensed by the plural light receiving systems.

REFERENCES:
patent: 4468120 (1984-08-01), Tanimoto et al.
patent: 5164603 (1992-11-01), Hartman et al.
patent: 5274434 (1993-12-01), Morioka et al.
patent: 5463459 (1995-10-01), Morioka et al.

Affiliated with

Also associated with

Rating

Foreign particle inspection apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Foreign particle inspection apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Foreign particle inspection apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-345113