Pumps – Successive stages – Parallel stages to or from single stage
Reexamination Certificate
2006-04-04
2006-04-04
Freay, Charles G. (Department: 3746)
Pumps
Successive stages
Parallel stages to or from single stage
C417S053000, C417S313000
Reexamination Certificate
active
07021903
ABSTRACT:
The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The gases are treated in the abatement chamber to render them compatible. The compatible gases are then drawn from the abatement chamber as a single stream through a backing pump.
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Bailey Christopher M.
Boger Michael S.
Freay Charles G.
The BOC Group Inc.
Zebrak Ira Lee
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