Force transducer etched from silicon

Details Force transducer etched from silicon Force transducer etched from silicon

1990-06-29

1991-09-03

Simmons, David A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156647, 156657, 156662, H01L 2100

Patent

active

050451529

ABSTRACT:
An accelerometer fabricated by silicon etching techniques. A first suspended beam is formed having a first conductive portion, the beam being deflectable in response to an acceleration force. A second beam having second and third conductive portions is suspended over the first beam. Phased lock loop circuitry oscillates the second beam at resonance and provides an electrical signal proportional to the acceleration force.

REFERENCES:
patent: 4345474 (1982-08-01), Deval
patent: 4435737 (1984-03-01), Colton
patent: 4483194 (1984-11-01), Rudolf
patent: 4674319 (1987-06-01), Muller et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4736629 (1988-04-01), Cole
patent: 4805456 (1989-02-01), Howe et al.

Affiliated with

Also associated with

Rating

Force transducer etched from silicon does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Force transducer etched from silicon, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Force transducer etched from silicon will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1006824