Force sensor and a method for manufacturing a force sensor

Measuring and testing – Dynamometers – Responsive to force

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G01L 100

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055535062

ABSTRACT:
In a force sensor, a resonator is mounted by means of a dielectric layer on a bending element. Deformation of the bending element changes the resonant frequency of the resonator.

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Tilmans et al., "A Differential Resonator Design using a Bossed Structure for Applications in Mechanical Sensors," Sensors and Actuators 25-27 (1991), pp. 385-393.

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