Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-06-26
1997-07-08
Dombroske, George M.
Measuring and testing
Surface and cutting edge testing
Roughness
250306, 250307, G01N 2300, H01J 3726
Patent
active
056463391
ABSTRACT:
A sensor (100) is set forth with which a microscope based on atomic forces is constructed and which represents the forces in up to three components. The sensor (100) is designed such that different vibration modes (transversal and torsional) can be induced individually and each mode corresponds to one force direction.
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"IBM Confidential" document, 2 pages, Feb. 2, 1996.
Bayer Thomas
Greschner Johann
Nonnenmacher, deceased Martin
Dombroske George M.
International Business Machines - Corporation
Morris Daniel P.
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