Focussing an electron beam

Details Focussing an electron beam Focussing an electron beam

1990-02-27

1991-07-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, 250311, H01J 3726

Patent

active

050327259

ABSTRACT:
A beam of, e.g. an electron microscope, is focussed on a specimen and secondary electrons generated thereby are detected and analyzed to generate an output signal. That output signal is investigated for one magnification or scanning time of the beam over a range of foci to determine the optimum output value for that one magnification. This investigation is repeated for other magnifications to generate a series of optimum output values. The optimum of that series is then determined, and the electron microscope may then be operated for that specimen at the focus corresponding to the optimum of the series of optimum values. In this way, automatic focussing is provided which permits the optimum focus to be determined in dependence on the specimen.

REFERENCES:
patent: 4071759 (1978-01-01), Namae
patent: 4169240 (1979-09-01), Anderson et al.
patent: 4199681 (1980-04-01), Namae
patent: 4393309 (1983-07-01), Norioka
patent: 4494000 (1985-01-01), Shii
patent: 4514634 (1985-04-01), Lawson
patent: 4724319 (1988-02-01), Shirota

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