Focusing-device for the radiation from a light source

Details Focusing-device for the radiation from a light source Focusing-device for the radiation from a light source

2011-01-18

2011-01-18

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

Reexamination Certificate

active

07871171

ABSTRACT:
A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.

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“EUV collectors: design, development, fabrication and testing”; XP-002348559, pp. 39-49; Authors : Wilhelm Egle, Wolfgang Hafner, Axel Matthes, Eral Erzin, Berhard, Ganswein, Herbert Schwarz, Piotr Marczuk Martin Antoni, Wolfgang Singer, Frank Melzer, Joachim Hainz, Calrl Zeiss Laser Optics, GmbH, 73445 Oberkochen, Germany, Carl Zeiss SMT-AG, 73447 Oberkochen, Germany.
EPO Search Report based on EP 1 189 089.

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