Focusing device for a television electron microscope

Details Focusing device for a television electron microscope Focusing device for a television electron microscope

1985-08-16

1987-07-14

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, 250398, H01J 3726

Patent

active

046804692

ABSTRACT:
Focusing device for a transmission type electron microscope displaying an enlarged image on a television monitor, in which the incident angle of the electron beam on the sample is varied with a constant frequency and the focal length of the objective electron lens is so controlled that there is no change between the image observed before change of the incident angle of the electron beam and that observed thereafter, wherein timing for changing the incident angle is set during the blanking intervals of the vertical synchronizing signal of the television so that fluctuations of the image can be clearly detected.

REFERENCES:
patent: 3597609 (1971-08-01), Anger
patent: 4097740 (1978-06-01), Muller et al.
patent: 4379231 (1983-04-01), Shii et al.
patent: 4399360 (1986-08-01), Fotino
patent: 4514629 (1985-04-01), Smith et al.

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