Focusing device, focusing method and a pattern inspecting...

Details Focusing device, focusing method and a pattern inspecting... Focusing device, focusing method and a pattern inspecting...

2007-02-27

2008-07-01

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C250S201400

Reexamination Certificate

active

07394048

ABSTRACT:
A focusing device comprises a first imaging optical system, a second imaging optical system which splits the optical image in the direction of an AF sensor and further splits the optical image so that a front focus image in which the point that is in focus is in front of the optical image on the inspecting sensor and a back focus image in which the point that is in focus is behind the optical image on the inspecting sensor are formed on the AF sensor, a focus detecting circuit which detects an optimum focus position on the basis of a high-frequency component of a front sensor image in a front focus position and a high-frequency component of a back sensor image in a back focus position, and a focus control circuit which controls the focusing of the first imaging optical system on the basis of the focus position.

REFERENCES:
patent: 2007/0280664 (2007-12-01), Ikeda et al.
patent: 60-26311 (1985-02-01), None
patent: 9-49965 (1997-02-01), None
patent: 11-271597 (1999-10-01), None

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