Focusing apparatus used in a transmission electron microscope

Details Focusing apparatus used in a transmission electron microscope Focusing apparatus used in a transmission electron microscope

1986-01-22

1987-10-06

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250397, H01J 3726

Patent

active

046985034

ABSTRACT:
A focus control system used in a transmission electron microscope includes an electron lens for imaging the electron beam transmitted through a specimen onto the imaging plate, apparatus for deflecting the electron beam irradiation angle, and several electron beam sensors disposed of the imaging plane. Output signals produced by each sensor at two irradiation angles are integrated and stored in the memory separately. The difference between each pair of integrated values in the memory is calculated, and all differences for all sensor output pairs are summed up. The lens current of the electron lens is controlled so that the summed output is a minimum value.

REFERENCES:
patent: 3833811 (1974-09-01), Koike et al.
patent: 3908124 (1975-09-01), Rose
patent: 4097740 (1978-06-01), Muller et al.
patent: 4169240 (1979-09-01), Anderson et al.
patent: 4283627 (1981-08-01), Isakozawa et al.
patent: 4494005 (1985-01-01), Shibata et al.
patent: 4514634 (1985-04-01), Lawson

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