Focused ion beam system with coaxial scanning electron...

Radiant energy – Radiant energy generation and sources – Plural radiation sources

Reexamination Certificate

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C250S492200, C250S492210, C250S492300, C250S3960ML, C250S3960ML

Reexamination Certificate

active

06900447

ABSTRACT:
A system including co-axial focused ion beam and an electron beam allows for accurate processing with the FIB using images formed by the electron beam. In one embodiment, a deflector deflects the electron beam onto the axis of the ion beam and deflects secondary particles collected through the final lens toward a detector. In one embodiment, a positively biased final electrostatic lens focuses both beams using the same voltage to allow simultaneous or alternating FIB and SEM operation. In one embodiment, the landing energy of the electrons can be varied without changing the working distance.

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Gnauck Peter: “A New Crossbeam Inspection Tool Combining An Ultrhigh Resolution Field Emmission SEM And A High resolution FIB” Proceeding od the SPIE, SPIE. Bellingham, VA, US vol. 4889, Mar. 4, 2002 pp. 833-840.

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