Radiant energy – Radiant energy generation and sources – Plural radiation sources
Reexamination Certificate
2005-05-31
2005-05-31
Lee, John R. (Department: 2881)
Radiant energy
Radiant energy generation and sources
Plural radiation sources
C250S492200, C250S492210, C250S492300, C250S3960ML, C250S3960ML
Reexamination Certificate
active
06900447
ABSTRACT:
A system including co-axial focused ion beam and an electron beam allows for accurate processing with the FIB using images formed by the electron beam. In one embodiment, a deflector deflects the electron beam onto the axis of the ion beam and deflects secondary particles collected through the final lens toward a detector. In one embodiment, a positively biased final electrostatic lens focuses both beams using the same voltage to allow simultaneous or alternating FIB and SEM operation. In one embodiment, the landing energy of the electrons can be varied without changing the working distance.
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Gnauck Peter: “A New Crossbeam Inspection Tool Combining An Ultrhigh Resolution Field Emmission SEM And A High resolution FIB” Proceeding od the SPIE, SPIE. Bellingham, VA, US vol. 4889, Mar. 4, 2002 pp. 833-840.
Gerlach Robert L.
Scheinfein Michael R.
Utlaut Mark W.
FEI Company
Fernandez Kalimah
Lee John R.
Scheinberg Michael O.
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