Fishing – trapping – and vermin destroying
Patent
1995-04-11
1997-06-17
Bowers, Jr., Charles L.
Fishing, trapping, and vermin destroying
427527, 427529, H01L 21316
Patent
active
056396996
ABSTRACT:
According to this invention, there is provided a method of repairing a bump defect of a structure obtained by forming a predetermined pattern on a substrate, having the steps of forming a first thin film consisting of a material different from that of the substrate on the substrate around the bump defect or close to the bump defect, forming a second thin film on the bump defect and the first thin film to flatten an upper surface of the second thin film, performing simultaneous removal of the bump defect and the thin films on an upper portion of the projecting defect and around the bump defect using a charged particle beam, and performing removal of the thin films left in the step of performing simultaneous removal. According to this invention, there is provided to a method of repairing a divot defect of a structure obtained by forming a predetermined pattern on a substrate, having the steps of burying a material in the divot defect and forming a projecting portion projecting from a substrate surface, covering a region including the projecting portion with flattening films consisting of a material different from that of the substrate to flatten an upper surface of the region, performing simultaneous removal of the projecting portion and the flattening films around the projecting portion using a charged particle beam, and performing removal of the flattening films left in the step of performing simultaneous removal.
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Horioka Keiji
Inoue Soichi
Kariya Mitsuyo
Komano Haruki
Miyoshi Motosuke
Bowers Jr. Charles L.
Kabushiki Kaisha Toshiba
Whipple Matthew
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