Focused ion beam apparatus and method of preparing/observing...

Details Focused ion beam apparatus and method of preparing/observing... Focused ion beam apparatus and method of preparing/observing...

2007-02-07

2009-12-01

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S492100, C250S492200, C250S492210, C430S297000

Reexamination Certificate

active

07626165

ABSTRACT:
A focused ion beam apparatus includes a sample base for mounting a sample, a three axis stage capable of moving the sample base in three directions: along two axes on a horizontal face and a vertical axis, and a first focused ion beam barrel and a second focused ion beam barrel for irradiating the sample with focused ion beams, the first focused ion beam barrel and the second focused ion beam barrel being arranged such that directions of the focused ion beams are substantially opposed to each other in a plane view thereof and are inclined in substantial line symmetry with regard to the vertical axis in a side view thereof.

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