Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2005-07-27
2008-08-12
Vanore, David A. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S306000, C250S307000, C250S310000, C250S3960ML, C250S3960ML
Reexamination Certificate
active
07411192
ABSTRACT:
A focused ion beam apparatus and a focused ion beam irradiation method are disclosed. Even in the case where a magnetic field exists on the optical axis of an ion beam and the particular magnetic field undergoes a change, the ion beam is focused without separating the isotopes on the sample at the same ion beam spot position as if the magnetic field is not existent. A canceling magnetic field is generated on the optical axis of the ion beam from a canceling magnetic field generator thereby to offset the deflection of the ion beam due to the external magnetic field.
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Ishitani Tohru
Ose Yoichi
Takeuchi Koichiro
Hitachi High-Technologies Corporation
McDermott Will & Emery LLP
Souw Bernard
Vanore David A.
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