Focused-beam ellipsometer

Details Focused-beam ellipsometer Focused-beam ellipsometer

2011-08-23

2011-08-23

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

08004677

ABSTRACT:
The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample.

REFERENCES:
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patent: 0 396 409 (1990-11-01), None
patent: 2005-98923 (2005-04-01), None
Masetti et al., In Situ Monitoring of film deposition with an ellipsometer based on a four detector photopolarimeter, Oct. 1996, Applied Optics, vol. 35, No. 28, pp. 5626-5629.

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