Focus error detector

Optics: measuring and testing – Focal position of light source

Patent

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Details

250201, 369 45, G01J 136

Patent

active

046951580

ABSTRACT:
A focus error detector comprises an inner group of light detector elements formed in a circular area about a focus point of an illumination beam for generating a first focus error signal. A second group of light detector elements formed in an annular-shaped area around the circular area for generating a second focus error signal, an amplifier for amplifying the second error signal, and an adder for combining the first and second focus error signals to generate a composite focus error signal.

REFERENCES:
patent: 4152586 (1979-05-01), Elliott et al.
patent: 4546460 (1985-10-01), Ando

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