Optics: measuring and testing – Angle measuring or angular axial alignment – Alignment of axes nominally coaxial
Patent
1998-12-24
2000-09-26
Kim, Robert H.
Optics: measuring and testing
Angle measuring or angular axial alignment
Alignment of axes nominally coaxial
356399, G01B 1126
Patent
active
061249246
ABSTRACT:
Scanning method and apparatus for maintaining a desired position of an article are presented. The apparatus comprises an illumination unit, a focusing optics and a focus detection unit. The illumination unit generates an incident light beam for illuminating an elongated region of the article and producing light returned from the illuminated region. The focusing optics focuses the incident beam onto a focal plane and collects at least a portion of the returned light. The focus detection unit comprises an imaging optics and a detector having a sensing surface responsive to light impinging thereon for generating data representative thereof. The imaging optics is capable of forming first and second images on the sensing surface. The first and second images are formed by first and second spatially separated substantially identical light components of the collected returned light, respectively, which propagate symmetrically relative to an optical axis of the focusing optics. A position of the first image relative to the second image is indicative of the position of the article relative to the focal plane.
REFERENCES:
patent: 4123652 (1978-10-01), Bouwhuis
patent: 4903066 (1990-02-01), Moriyama et al.
patent: 5563702 (1996-10-01), Emery et al.
patent: 5570189 (1996-10-01), Salmon
patent: 5673101 (1997-09-01), Tenner et al.
Almogy Gilad
Feldman Haim
Komeem Amir
Naftali Ron
Applied Materials Inc.
Kim Robert H.
Nguyen Tu T.
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