Focus detection unit and microscope using the focus detection un

Details Focus detection unit and microscope using the focus detection un Focus detection unit and microscope using the focus detection un

1997-11-06

1999-10-05

Nguyen, Thong

Optical: systems and elements

Compound lens system

Microscope

359385, 2502013, G02B 2106, G02B 2306

Patent

active

059633662

ABSTRACT:
A focus detection unit including an optical system employing an image sandwiching method is disclosed. In the focus detection unit, a double slit mask (12) forming double sight lines is disposed on the optical axis of a lamp 10 while a single slit mask (16) forming an single sight line is disposed on the optical axis of a lamp (14). A triangular pole prism 18 is provided, consisting of first and second side surfaces, which together constitutes an edge, and a plane opposing the edge. The prism (18) is disposed such that the double and single sight line are able to irradiate the first and second side surfaces. The prism reflects the incoming lines toward a plane before the right-angle edge. Before the edge of the prism (18), a projection lens (20) is provided for forming images of the double and single sight lines which have been reflected by the prism (18) and separated by a mask (22), at a both aiming line imaging position 100. The images are projected onto a workpiece.

REFERENCES:
patent: 4406526 (1983-09-01), Smith
patent: 4734570 (1988-03-01), Horikawa et al.
patent: 4798948 (1989-01-01), Neumann et al.
patent: 5317142 (1994-05-01), Noda et al.
English Abstract of Japanese reference No. 1-304414.
English Abstract of Japanese reference No. 4-20910.

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