Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-08-05
2010-06-29
Nguyen, Tu T (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
07746471
ABSTRACT:
A substantially self-contained “on-board” material system investigation system for effecting relative translational and rotational motion between a source and detector of electromagnetic radiation and a sample, which system is functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a sample, including the capability to easily and conveniently effect rotation and/or to change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface and/or to provide gas flow confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and/or NIR wavelengths of electromagnetic radiation is caused to be impinged thereupon.
REFERENCES:
patent: 3874797 (1975-04-01), Hasai
patent: 4053232 (1977-10-01), Dill
patent: 4647207 (1987-03-01), Bjorh et al.
patent: 4668086 (1987-05-01), Rosencwais et al.
patent: 4672196 (1987-06-01), Canino
patent: 5229833 (1993-07-01), Stewart
patent: 5329357 (1994-07-01), Bernoux et al.
patent: 5343293 (1994-08-01), Berger et al.
patent: 5410409 (1995-04-01), Ray
patent: 5412473 (1995-05-01), Rosencwais et al.
patent: 5438415 (1995-08-01), Kazama et al.
patent: 5504582 (1996-04-01), Johs et al.
patent: 5521706 (1996-05-01), Green et al.
patent: 5581350 (1996-12-01), Chen et al.
patent: 5582646 (1996-12-01), Woollam et al.
patent: 5596406 (1997-01-01), Rosencwais et al.
patent: 5666201 (1997-09-01), Johs et al.
patent: 5706087 (1998-01-01), Thompson
patent: 5706212 (1998-01-01), Thompson et al.
patent: 5757494 (1998-05-01), Green et al.
patent: 5764365 (1998-06-01), Finarov
patent: 5872630 (1999-02-01), Johs et al.
patent: 5963327 (1999-10-01), He
patent: 6008906 (1999-12-01), Mavis
patent: 6031614 (2000-02-01), Michaelis et al.
patent: 6034777 (2000-03-01), Johs et al.
patent: 6081334 (2000-06-01), Grimbersen et al.
patent: 6721052 (2004-04-01), Zhao et al.
patent: 6813026 (2004-11-01), McAninch
patent: 7277171 (2007-10-01), Johs et al.
Goeden Christopher A.
He Ping
Johs Blaine D.
Liphardt Martin M.
Welch James D.
J.A Woollam Co., Inc.
Nguyen Tu T
Welch James D.
LandOfFree
Flying mobile on-board ellipsometer, polarimeter,... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Flying mobile on-board ellipsometer, polarimeter,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flying mobile on-board ellipsometer, polarimeter,... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4207236