Fly's eye integrator, illuminator, lithographic apparatus...

Details Fly's eye integrator, illuminator, lithographic apparatus... Fly's eye integrator, illuminator, lithographic apparatus...

2009-10-26

2011-10-04

Mack, Ricky (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

C359S620000

Reexamination Certificate

active

08031404

ABSTRACT:
A transmissive fly's eye integrator is disclosed that includes a first array of lenses and a second array of lenses. The first array of lenses and second array of lenses together form a fly's eye integrator, and the first array of lenses and second array of lenses comprise lenses which have a diameter selected from the range of 5 μm-50 μm, and a radius of curvature selected from the range of 25 μm-2500 μm.

REFERENCES:
patent: 6428940 (2002-08-01), Sandstrom
patent: 6438199 (2002-08-01), Schultz et al.
patent: 6498685 (2002-12-01), Johnson
patent: 7081956 (2006-07-01), Lalovic et al.
patent: 7186983 (2007-03-01), Mann et al.
patent: 2003/0142409 (2003-07-01), Ohtsu et al.
patent: 2004/0125459 (2004-07-01), Tanitsu et al.

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