Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1996-09-20
1999-05-04
Niebling, John F.
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
438661, 438662, 257738, 29843, H01L 23488, H01L 2144
Patent
active
058997377
ABSTRACT:
A fluxless method for fusing preformed solder balls to contact pads on a semiconductor package substrate wherein a masking plate having one or more vertical holes corresponding to the contact pads is placed over the package substrate, oxide-free solder balls are placed in the holes, the assembly is preheated to a temperature less than the melting point of the solder, and an energetic beam is directed onto the preformed solder balls to melt them and fuse them to the contact pads.
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LSI Logic Corporation
Nguyen Ha Tran
Niebling John F.
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